In the semiconductor device production workshop, due to the dust adsorbed on the chip, the yield of IC, especially VLSI, will be greatly reduced. All operators in IC production workshop wear clean work clothes. If the human body carries static electricity, it is very easy to absorb dust and dirt. If these dust and dirt are brought to the operation site, it will affect the product quality, deteriorate the product performance and greatly reduce the IC yield. If the radius of adsorbed dust particles is greater than 100 μ M line width is about 100 μ M, the film thickness is 50 μ M, the product is most likely to be scrapped.
Therefore, it is necessary to establish an electrostatic protection system in the process of IC processing, production and packaging! IC packaging production line has more strict requirements on static electricity. In order to ensure the normal operation of the production line, the clean workshop shall be decorated with anti-static building materials, and all personnel entering and leaving the clean workshop shall be equipped with anti-static clothes. In addition to taking hardware measures, the packaging enterprise can formulate enterprise standards or specific requirements in terms of anti-static according to relevant national standards and the actual situation of the enterprise, To cooperate with the normal operation of IC packaging production line
